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Autor(en):
Heiß, L.; Lachmann, A.; Schwab, R.; Panagopoulos, G.; Baumgartner, P.; Virupakshappaa, M. Y.; Schmitt-Landsiedel, D. 
Titel:
{T}est structures for {CMOS} {RF} reliability assessment 
Stichworte:
CMOS integrated circuits; high-k dielectric thin films; integrated circuit reliability; integrated circuit testing; oscilloscopes; radiofrequency integrated circuits; CMOS RF reliability assessment; HKMG technology; OCO; RF stress; high-k-metal-gate technology; on-chip AC stress circuits; on-chip oscilloscope; test structures; Clocks; Integrated circuit reliability; Radio frequency; Stress; Stress measurement; System-on-chip 
Kongress- / Buchtitel:
2016 International Conference on Microelectronic Test Structures (ICMTS) 
Jahr:
2016 
Monat:
March 
Seiten:
76-81