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Document type:
Konferenzbeitrag 
Contribution type:
Textbeitrag / Aufsatz 
Author(s):
Schrag, G.: Künzig, T.; Glacer, C.; Dehe, A.; Wachutka, G. 
Title:
Acoustic High-Frequency Effects Inside the Package of Capacitive Silicon Microphones and Their Impact on the Device Performance 
Pages contribution:
95170M1-95170M6 
Book / Congress title:
Proceedings of SPIE 9517, Smart Sensors, Actuators, and MEMS VII and Cyber Physical Systems 
Date of congress:
May, 4-6 
Year:
2015