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Author(s):
Vietzorreck, Larissa 
Title:
EM Modeling of RF MEMS 
Abstract:
The modeling of RF MEMS circuits and components is an important issue, as by proper modeling and optimization of a structure prior to the technological realization the time for a production cycle can be reduced. RF MEMS are in general three-dimensional structured devices, which can be analyzed with all common design and simulation tools. On the other hand the geometrical dimensions, varying from a fraction of a micron to several millimeters, create aspect ratios that make the accurate full wave...    »
 
Keywords:
3D structured devices, circuit optimisation, electromagnetic devices, EM modeling, full wave method, geometrical dimensions, micromechanical devices, production cycle, radiofrequency integrated circuits, RF MEMS circuits 
Book / Congress title:
7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSime) 
Publisher address:
Como, Italy 
Year:
2006 
Month:
apr 
Pages:
1--4