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Autor(en):
Arcioni, P.; Conciauro, G.; Farinelli, Paola; Mezzanotte, Paolo; Repossi, M.; Vietzorreck, Larissa 
Titel:
Mastering Parasitics in Complex MEMS Circuits 
Abstract:
Because of the tight coupling between closely spaced 3-D elements, parasitic effects often degrade the overall performance of complex MEMS circuits. A single-pole-double-throw (SPDT) switch in CPW technology consisting of a T-junction with one series-resistive and one shunt-capacitive MEMS switches per arm has been fabricated and tested. Parasitic coupling is shown to significantly affect the isolation of the isolated arm. While full-wave EM simulators would lead to unaffordable computational ef...    »
 
Stichworte:
coplanar waveguides, CPW technology, EM simulators, MEMS circuits, microswitches, microwave switches, parasitic coupling, series-resistive MEMS switches, shunt-capacitive MEMS switches, single-pole-double-throw switch, SPDT switch, spurious coupling, T-junction 
Kongress- / Buchtitel:
35th European Microwave Conference (EuMC) 
Band / Teilband / Volume:
Verlagsort:
Paris, France 
Jahr:
2005 
Monat:
oct 
Seiten:
943--946