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Author(s):
Coccetti, Fabio; Vietzorreck, Larissa; Chtchekatourov, Vitali; Russer, Peter 
Title:
A numerical study of MEMS capacitive switches 
Book / Congress title:
16th Annual Review of Progress in Applied Computational Electromagnetics (ACES) 
Publisher address:
Monterey, CA, USA 
Year:
2000 
Month:
mar 
Pages:
580--586