Benutzer: Gast  Login
Autor(en):
Vietzorreck, Larissa 
Titel:
Modeling of the Millimeter-Wave Behavior of MEMS Capacitive Switches 
Abstract:
The analysis of the millimeter-wave behavior of micromechanical capacitive switches by the method of lines (MoL) is presented. For this purpose the method of lines is extended for consideration of very thin lossy metallic and dielectric layers without increasing the numerical effort by modifying the difference operators in a suitable way. The calculated results of a metal membrane switch show very good agreement to measured data 
Stichworte:
dielectric layer, difference operator, MEMS capacitive switch, metal membrane, method of lines, micromechanical devices, microwave switches, millimeter-wave device, millimetre wave devices, numerical model 
Kongress- / Buchtitel:
IEEE MTT-S International Microwave Symposium 
Band / Teilband / Volume:
Verlagsort:
Anaheim, CA, USA 
Jahr:
1999 
Monat:
jun 
Seiten:
1685--1688