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Author(s):
Ulm, M.; Vietzorreck, Larissa; Reimann, M.; Walter, T.; Müller-Fiedler, R.; Kaspar, E.; Russer, Peter 
Title:
Silicon-Based Millimeterwave MEMS Switches 
Book / Congress title:
International Symposium on Signals, Systems, and Electronics (ISSSE) 
Publisher address:
Tokyo, Japan 
Year:
2001 
Month:
jul 
Pages:
110--113