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- Title:
Performance of a combined chromatic confocal microscope with thin film reflectometer
- Document type:
- Konferenzbeitrag
- Author(s):
- Hirth, F.; Buck, T.C.; Steinhausen, N.; Koch, A.W.
- Book / Congress title:
- SPIE Proceedings Vol. 7729
- Year:
- 2010
- Reviewed:
- ja
- Language:
- en
- Semester:
- SS 10
- Format:
- Text
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