Login
- Title:
Influence of surface structure on shape and roughness measurement using two-wavelength speckle interferometry
- Document type:
- Konferenzbeitrag
- Author(s):
- Bodendorfer, T.; Mayinger, P.; Koch, A.W.
- Book / Congress title:
- SPIE Optical Metrology 2013, Modeling Aspects in Optical Metrology IV
- Congress (additional information):
- Munich, Germany, 13.05.2013, conference vol. 8789, paper no. 8789-8, doi:10.1117/12.2020270, http://dx.doi.org/10.1117/12.2020270
- Volume:
- vol. 8789
- Date of congress:
- 13.05.2013
- Year:
- 2013
- Reviewed:
- ja
- Language:
- en
- Fulltext / DOI:
- doi:http://dx.doi.org/10.1117/12.2020270
- Semester:
- SS 13
BibTeX