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- Title:
Contactless Functionality Inspection of Flat-Panel Display Pixels and Thin-Film Transistors by Capacitive Coupling
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Koerdel, M.; Alatas, F.; Schick, A.; Jongman, J.; Sekhar, C.; Rupitsch, S.J.; Lerch, R.
- Journal title:
- IEEE Transactions on Electron Devices
- Year:
- 2012
- Journal issue:
- Nov./Dez. 2012
- Reviewed:
- ja
- Language:
- en
- Status:
- Verlagsversion / published
- Semester:
- WS 12-13
- Format:
- Text
BibTeX