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- Title:
Contactless inspection of planar electronic devices by capacitive coupling: Development of a model describing the sensor signal and its impact on signal post-processing
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Koerdel, M.; Alatas, F.; Schick, A.; Rupitsch, S.J.; Lerch, R.
- Journal title:
- Sensors and Actuators A: Physical
- Year:
- 2011
- Reviewed:
- ja
- Language:
- en
- Fulltext / DOI:
- doi:doi:10.1016/j.sna.2011.02.040
- Semester:
- WS 10-11
- Format:
- Text
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