Modeling and physical analysis of an out-of-plane capacitive MEMS transducer with dynamically coupled electrodes

Bosetti, G.; Manz, J.; Dehé, A.; Krumbein, U.; Schrag, G.

doi:10.1007/s00542-018-04290-2

Document type:: Zeitschriftenaufsatz
Author(s):: Bosetti, G.; Manz, J.; Dehé, A.; Krumbein, U.; Schrag, G.
Title:: Modeling and physical analysis of an out-of-plane capacitive MEMS transducer with dynamically coupled electrodes
Journal title:: Microsystem Technologies
Year:: 2019
Fulltext / DOI:: doi:10.1007/s00542-018-04290-2
Publisher:: Springer Berlin Heidelberg
Date of publication:: 16.03.2019
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