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Document type:
Zeitschriftenaufsatz 
Author(s):
Nagel, R. D.; Haeberle, T.; Schmidt, M.; Lugli, P.; Scarpa, G. 
Title:
Large Area Nano-transfer Printing of Sub-50-nm Metal Nanostructures Using Low-cost Semi-flexible Hybrid Templates 
Abstract:
In this work, we present a method for printing metal micro- and nanopatterns down to sub-50-nm feature sizes using replicated, defect-tolerant stamps made out of OrmoStamp®; material. The relevant parameters for a successful transfer over large areas were investigated and yields above 99 % have been achieved. Comparing our results to conventional nano-transfer printing using PDMS stamps, we find that the more rigid hybrid polymer used here prevents unintended transfer from interspaces between s...    »
 
Keywords:
Nano-transfer printing Thin-film Nanofabrication Material science Nanotechnology 
Journal title:
Nanoscale Res Lett. 2016 Dec; 11(1):14 2016-03 
Year:
2016 
Year / month:
2016-03 
Quarter:
1. Quartal 
Month:
Mar 
Language:
en 
Publisher:
Springer International Publishing Ltd