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Document type:
Konferenzbeitrag 
Author(s):
Weiler, B.; Ostermayr, C.; Stimming, U.; Scarpa, G. 
Title:
Nanoimprinting and nanotransfer for electrochemical systems 
Abstract:
Nanofabrication is a core task performed and constantly further developed by todays and future semiconductor industry. The most challenging issues to overcome within this technology are minimizing process cost, increasing fabrication reliability and optimizing throughput. Printing techniques play a crucial role in efficient nanofabrication since they pave the way to large area patterning while keeping overall process time shorter and costs lower than any other traditional nanolithography...    »
 
Book / Congress title:
The Energy and Materials Research Conference (EMR2012), 
Congress (additional information):
Torremolinos, Malaga, Spain, June 20-22, 2012. 
Year:
2012 
Quarter:
2. Quartal 
Year / month:
2012-06 
Month:
Jun