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Dokumenttyp:
Konferenzbeitrag 
Autor(en):
Weiler, B.; Ostermayr, C.; Stimming, U.; Scarpa, G. 
Titel:
Nanoimprinting and nanotransfer for electrochemical systems 
Abstract:
Nanofabrication is a core task performed and constantly further developed by todays and future semiconductor industry. The most challenging issues to overcome within this technology are minimizing process cost, increasing fabrication reliability and optimizing throughput. Printing techniques play a crucial role in efficient nanofabrication since they pave the way to large area patterning while keeping overall process time shorter and costs lower than any other traditional nanolithography...    »
 
Kongress- / Buchtitel:
The Energy and Materials Research Conference (EMR2012), 
Kongress / Zusatzinformationen:
Torremolinos, Malaga, Spain, June 20-22, 2012. 
Jahr:
2012 
Quartal:
2. Quartal 
Jahr / Monat:
2012-06 
Monat:
Jun