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Author(s):
Sattler, Sebastian; Felgentreff, Tilmann; Russer, Peter H. 
Title:
A Coplanar Millimeterwave Resonator on Silicon 
Abstract:
A coplanar waveguide (CPW) resonator built with a completely coplanar technique on a grounded silicon substrate is discussed. The input impedance is investigated experimentally and numerically. The passive planar structure is extensively studied using a space-domain full-wave analysis method. The resonator is fed by a coplanar transmission line through a capacitive gap and shows a marked resonance at the fundamental coplanar waveguide mode. Calculated and measured data agree to better than 5 
Keywords:
capacitive gap, coplanar millimeterwave resonator, coplanar transmission line, coplanar waveguide, CPW, electric impedance, grounded Si substrate, input impedance, MIMIC, MMIC, MM-wave type, passive planar structure, resonators, silicon, space-domain full-wave analysis, strip line components 
Book / Congress title:
IEEE Microwave and Millimeter-Wave Monolithic Circuits Symposium 
Publisher address:
Atlanta, GA, USA 
Year:
1993 
Month:
jun 
Pages:
57--60