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Autor(en):
Meier, H.; Schneiderbauer, B.; Russer, Peter H.
Titel:
Propagation of Leaky Surface Acoustic Waves Under Thin Periodic Metal Electrodes
Abstract:
Leaky surface acoustic waves (LSAWs) propagating under thin periodic metal gratings on anisotropic and piezoelectric substrates are investigated. The inherent physical behavior of LSAWs, consisting of coupled modes including terms decaying into the substrate and a term representing a radiating bulk wave, under thin metal strips is explained. A field theoretical analysis that fits both the mechanical and electrical periodic boundary conditions is developed. Four types of electrically connected me...     »
Stichworte:
Al-LiTaO3, anisotropic substrates, attenuation constant, bulk wave scattering, coupled modes, dispersion relation, dispersion relations, electrically connected metal strips, frequency dependence, leaky surface acoustic waves, LiTaO3 substrate, mechanical surface perturbation, periodic boundary conditions, periodic metal gratings, piezoelectric substrates, radiating bulk wave, surface acoustic wave devices, surface acoustic waves, thin periodic metal electrodes, ultrasonic propagation
Kongress- / Buchtitel:
IEEE Ultrasonics Symposium
Band / Teilband / Volume:
1
Verlagsort:
Tucson, AZ, USA
Jahr:
1992
Monat:
oct
Seiten:
441--444
Volltext / DOI:
doi:10.1109/ULTSYM.1992.275940
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