A Novel PDMS Based Capacitive Pressure Sensor

Riedl, X.; Boltzmacher, C.; Wagner, R.; Bauer, K.; Schwesinger, N.

doi:10.1109/ICSENS.2010.5690709

Document type:: Konferenzbeitrag
Contribution type:: Textbeitrag / Aufsatz
Author(s):: Riedl, X.; Boltzmacher, C.; Wagner, R.; Bauer, K.; Schwesinger, N.
Title:: A Novel PDMS Based Capacitive Pressure Sensor
Pages contribution:: 2255 - 2258
Abstract:: In this paper, a capacitive pressure sensor for aeronautical applications is presented. The sensor mainly consists of a thin structured layer of Polydimethylsiloxane (PDMS) that is embedded between two metal films. In this application the structured PDMS layer is used as dielectric and as spring element. The optimal design of the sensor was determined using a finite element analysis. The technological implementation of the first test samples using microtechnology is shown. The static and dynamic characterization of the pressure sensor validates the high sensitivity and temporal resolution of the sensor. «
In this paper, a capacitive pressure sensor for aeronautical applications is presented. The sensor mainly consists of a thin structured layer of Polydimethylsiloxane (PDMS) that is embedded between two metal films. In this application the structured PDMS layer is used as dielectric and as spring element. The optimal design of the sensor was determined using a finite element analysis. The technological implementation of the first test samples using microtechnology is shown. The static and dynamic... »
Book / Congress title:: IEEE Sensors 2010 Conference
Publisher:: IEEE
Year:: 2010
Quarter:: 4. Quartal
Month:: Nov
Print-ISBN:: 978-1-4244-8170-5
E-ISBN:: 978-1-4244-8168-2
Reviewed:: nein
Language:: en
Fulltext / DOI:: doi:10.1109/ICSENS.2010.5690709
WWW:: http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5690709
Semester:: WS 10-11
Format:: Text
BibTeX

Occurrences:

mediaTUM Gesamtbestand Einrichtungen Schools TUM School of Computation, Information and Technology ehemalige Lehrstühle und Fachgebiete Mikrostrukturierte mechatronische Systeme (N.N.)2010

mediaTUM Gesamtbestand Hochschulbibliographie 2010 Fakultäten Elektrotechnik und Informationstechnik Fachgebiet Mikrostrukturierte mechatronischer Systeme (Prof. Schwesinger)