Zähringer, S.; Menacher, M.; Kirchner, P.; Schwesinger, N.
Design of a normally closed piezoelectric micro valve
448-451
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo
NSTI-Nanotech 2010
2010