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Dokumenttyp:
Konferenzbeitrag 
Art des Konferenzbeitrags:
Textbeitrag / Aufsatz 
Autor(en):
Riedl, X.; Boltzmacher, C.; Wagner, R.; Bauer, K.; Schwesinger, N. 
Titel:
A Novel PDMS Based Capacitive Pressure Sensor 
Seitenangaben Beitrag:
2255 - 2258 
Abstract:
In this paper, a capacitive pressure sensor for aeronautical applications is presented. The sensor mainly consists of a thin structured layer of Polydimethylsiloxane (PDMS) that is embedded between two metal films. In this application the structured PDMS layer is used as dielectric and as spring element. The optimal design of the sensor was determined using a finite element analysis. The technological implementation of the first test samples using microtechnology is shown. The static and dynamic...    »
 
Kongress- / Buchtitel:
IEEE Sensors 2010 Conference 
Konferenzort:
Waikoloa, USA 
Verlag / Institution:
IEEE 
Jahr:
2010 
Quartal:
4. Quartal 
Monat:
Nov 
Print-ISBN:
978-1-4244-8170-5 
E-ISBN:
978-1-4244-8168-2 
Reviewed:
nein 
Sprache:
en 
Semester:
WS 10-11 
Format:
Text