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Document type:
Konferenzbeitrag 
Contribution type:
Textbeitrag / Aufsatz 
Author(s):
Riedl, X.; Boltzmacher, C.; Wagner, R.; Bauer, K.; Schwesinger, N. 
Title:
A Novel PDMS Based Capacitive Pressure Sensor 
Pages contribution:
2255 - 2258 
Abstract:
In this paper, a capacitive pressure sensor for aeronautical applications is presented. The sensor mainly consists of a thin structured layer of Polydimethylsiloxane (PDMS) that is embedded between two metal films. In this application the structured PDMS layer is used as dielectric and as spring element. The optimal design of the sensor was determined using a finite element analysis. The technological implementation of the first test samples using microtechnology is shown. The static and dynamic...    »
 
Book / Congress title:
IEEE Sensors 2010 Conference 
Publisher:
IEEE 
Year:
2010 
Quarter:
4. Quartal 
Month:
Nov 
Print-ISBN:
978-1-4244-8170-5 
E-ISBN:
978-1-4244-8168-2 
Reviewed:
nein 
Language:
en 
Semester:
WS 10-11 
Format:
Text