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Author(s):
Osswald, Patrick; Kiermaier, Josef; Becherer, Markus; Schmitt-Landsiedel, Doris 
Title:
Focused Ion Beam Lithography for Rapid Prototyping of Metallic Films 
Pages contribution:
310 
Book / Congress title:
Verhandl. DPG (VI) 
Volume:
45 
Year:
2010