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Document type:
Konferenzbeitrag 
Author(s):
Künzig, T.; Niessner, M. ; Wachutka, G.; Schrag, G.; Hammer, H. 
Title:
"The Effect of Thermoelastic Damping on the Total Q-Factor of State-of-the-Art MEMS Gyroscopes with Complex Beam-Like Suspensions" 
Book / Congress title:
Proceedings of EUROSENSORS XXIV 
Congress (additional information):
September 5-8, 2010, Linz, Austria 
Year:
2010 
Language:
en 
Publication format:
CD-ROM / DVD 
Format:
Text