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- Author(s):
- HOFMANN, J; VEPREK, S
- Title:
- Ultra thin 3C-SiC pseudomorphic films on Si (100) prepared by organometallic CVD with methyltrichlorosilane
- Journal title:
- THIN SOLID FILMS
- Year:
- 1998
- Journal volume:
- 318
- Journal issue:
- 1-2
- Pages contribution:
- 18-21
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