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- Author(s):
- PROKOP, J; ZYBILL, CE; VEPREK, S
- Title:
- nm-Co2Si, CoSi and CoSi2 silicide films from the single source precursor CoSiCl3(CO)(4) in the presence of SiH4
- Journal title:
- THIN SOLID FILMS
- Year:
- 2000
- Journal volume:
- 359
- Journal issue:
- 1
- Pages contribution:
- 39-45
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