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Author(s):
NIEDERHOFER, A; NESLADEK, P; MANNLING, HD; al., et 
Title:
Structural properties, internal stress and thermal stability of nc-TiN/a-Si3N4, nc-TiN/TiSix and nc-(Ti1-yAlySix)N superhard nanocomposite coatings reaching the hardness of diamond 
Journal title:
SURFACE & COATINGS TECHNOLOGY 
Year:
1999 
Journal volume:
121 
Pages contribution:
173-178