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Author(s):
FANG, QF; LIU, Q; LI, SZ; al., et 
Title:
Internal friction studies of nanocomposite superhard nc-TiN/a-Si3N4 and nc-(Ti1-xAlx)N/a-Si3N4 films 
Journal title:
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING 
Year:
2006 
Journal volume:
442 
Journal issue:
1-2 
Pages contribution:
328-331