Niessner, M. ; Schrag, G. ; Iannacci, J. ; Wachutka, G.
Title:
"Experimentally Validated and Automatically Generated Multi-Energy Domain Coupled Model of a RF-MEMS Switch"
Pages contribution:
pp. 595-600
Book / Congress title:
Proceedings of the 10th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2009