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- Document type:
- Konferenzbeitrag
- Author(s):
- Bosetti, Gabriele; Bretthauer, Christian; Bogner, Andreas; Krenzer, Michael; Gierl, Karolina; Heiss, Heinrich; Schrag, Gabriele
- Title:
- Design Optimization of a Corrugated Piezoelectric MEMS Microphone applying Genetic Algorithms
- Book / Congress title:
- 2024 25th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
- Publisher:
- IEEE
- Date of publication:
- 07.04.2024
- Year:
- 2024
- Fulltext / DOI:
- doi:10.1109/eurosime60745.2024.10491462
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