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Document type:
Zeitschriftenaufsatz 
Author(s):
Bosetti, G.; Manz, J.; Dehé, A.; Krumbein, U.; Schrag, G. 
Title:
Modeling and physical analysis of an out-of-plane capacitive MEMS transducer with dynamically coupled electrodes 
Journal title:
Microsystem Technologies 
Year:
2019 
Publisher:
Springer Berlin Heidelberg 
Date of publication:
16.03.2019