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Document type:
Zeitschriftenaufsatz 
Author(s):
Sebastian Huebner, Natsuki Miyakawa, Andreas Pahlke, Franz Kreupl 
Title:
Performance Improvement of Graphenic Carbon X-ray Transmission Windows 
Abstract:
Graphenic carbon (GC) x-ray transmission windows for EDX and XRF applications with a high transparency for x-rays below 2.5 keV have been fabricated on 6 inch wafers with a CMOS-compatible CVD process. GC windows with an open diameter of 7.4 mm and a thickness of 770 nm withstand up to 6.5 bars of differential pressure. A high transmissivity of 40 % for fluorine Kα (0.677 keV) radiation is demonstrated for a GC thickness of 650 nm. The GC membranes outperform beryllium (Be) windows, in terms of...    »
 
Journal title:
MRS Advances 
Year:
2016 
Journal volume:
Available on CJO 2016 doi:10.1557/adv.2016.194 
Year / month:
2016-03 
Month:
Mar 
Journal issue:
MRS Advances / FirstView Article / March 2016, pp 1 - 6 DOI: 10.1557/adv.2016.194, Published online: 14 March 2016 
Pages contribution:
Covered by:
Scopus 
Reviewed:
ja 
Language:
en 
Fulltext / DOI:
Publisher:
Cambridge University Press 
Status:
Verlagsversion / published 
TUM Institution:
Hybride Elektronische Systeme