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Dokumenttyp:
Zeitschriftenaufsatz 
Autor(en):
Buchholz, K.; Tinazli, A.; Kleefen, A.; Dorfner, D.; Pedone, D.; Rant, U.; Tampé, R.; Abstreiter, G.; Tornow, M. 
Titel:
Silicon-on-insulator based nanopore cavity arrays for lipid membrane investigation 
Abstract:
We present the fabrication and characterization of nanopore microcavities for the investigation of transport processes in suspended lipid membranes. The cavities are situated below the surface of silicon-on-insulator (SOI) substrates. Single cavities and large area arrays were prepared using high resolution electron-beam lithography in combination with reactive ion etching (RIE) and wet chemical sacrificial underetching. The locally separated compartments have a circular shape and allow the encl...    »
 
Zeitschriftentitel:
Nanotechnology. 2008 Nov 5; 19(44):445305 2008-10 
Jahr:
2008 
Jahr / Monat:
2008-10 
Quartal:
4. Quartal 
Monat:
Oct 
Reviewed:
ja 
Sprache:
en 
Verlag / Institution:
IOP Science Publishing