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Schrag, G.: Künzig, T.; Glacer, C.; Dehe, A.; Wachutka, G.
Acoustic High-Frequency Effects Inside the Package of Capacitive Silicon Microphones and Their Impact on the Device Performance
95170M1-95170M6
Proceedings of SPIE 9517, Smart Sensors, Actuators, and MEMS VII and Cyber Physical Systems
2015

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Manz, J.; Wachutka, G.; Schrag, G.
Fluidic Damping in Micro- and Nano-Scale Mechanical Resonators in the Molecular Flow Regime: A Momentum Transfer Based Analytical Approach
Proceedings of the 18th Int. Conf. on Solid State Sensors, Actuators and Microsystems
2015

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Künzig, T.; Schrag, G.; Dehe, A.; Wachutka, G.
Modeling Distributed Electrostatic Effects in Silicon Microphones and Their Impact on the Performance
Proceedings of SPIE 9517, Smart Sensors, Actuators, and MEMS VII and Cyber Physical Systems
SPIE
2015

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Erlbacher, T.; Büttner, T.; Bauer, A.J.; Huang, Y.; Wachutka, G.; Frey, L.
Requirements and Design of 4,5 kV 4H-SiC Merged pin/Schottky Diodes for Wind power
Proceedings of the 39th Workshop on Compound Semiconductor Devices and Integrated Circuits
WOCSDICE
2015

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Niessner, M.
Wachutka, G.; Schmitt-Landsiedel, D.
Modellierung und Simulation des elektro-fluid-mechanisch gekoppelten Verhaltens von Mikrobauteilen auf der Systemebene
Shaker Verlag
2015

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Gawlina-Schmidl, Y.
Wachutka, G.; Schmitt-Landsiedel, D.
Analyse ionenreduzierter Ausfallmechanismen in hochintegrierten CMOS-Speicherzellen
Shaker Verlag
2015

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Künzig, T.; Schrag, G.; Dehe, A.; Wachutka, G.
Performance and Noise Analysis of Capacitive Silicon Microphones Using Tailored System-Level Simulation
2192-2195
Proceedings of the 18th Int. Conf. on Solid State Sensors, Actuators and Microsystems
2015

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Schrag, G.; Künzig, T.
Maßgeschneiderte Modelle für Mikrosysteme mit Hilfe verallgemeinerter Kirchhoffscher Netze
37-46
Nichtelektrische Netzwerke: Wie die Systemtheorie hilft, die Welt zu verstehen
TUDpress Dresdner Beiträge zur Sensorik
2015

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Wieland, R.; Nguyen, K.; Seidelmann, U.; Scholz, M.; Schrag, G.
Wafer edge protection kit for MEMS and TSV Si-Etching
951724-1 bis 951724-8
Proceedings of SPIE 9517, Smart Sensors, Actuators, and MEMS VII and Cyber Physical Systems
May 4-6, 2015, Barcelona, Spain
2015

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Weiß, Chr.
Wachutka, G. u. Schmitt-Landsiedel, D.
Höhenstrahlungsresistenz von Silizium-Hochleistungsbauelementen
Shaker Verlag
2015
91