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Document type:
Zeitschriftenaufsatz
Author(s):
Schukfeh, M.I.; Storm, K.; Hansen, A.; Thelander, C.; Hinze, P.; Beyer, A.; Weimann, T.; Samuelson, L.; Tornow, M.
Title:
Formation of nanogaps in InAs nanowires by selectively etching embedded InP segments
Abstract:
We present a method to fabricate nanometer scale gaps within InAs nanowires by selectively etching InAs/InP heterostructure nanowires. We used vapor–liquid–solid grown InAs nanowires with embedded InP segments of 10–60 nm length and developed an etching recipe to selectively remove the InP segment. A photo-assisted wet etching process in a mixture of acetic acid and hydrobromic acid gave high selectivity, with accurate removal of InP segments down to 20 nm, leaving the InAs wire largely unattack...     »
Journal title:
Nanotechnology 25 465306 2014-10
Year:
2014
Year / month:
2014-10
Quarter:
4. Quartal
Month:
Oct
Reviewed:
ja
Language:
en
WWW:
https://iopscience.iop.org/article/10.1088/0957-4484/25/46/465306
Publisher:
IOP Science
Status:
Postprint / reviewed
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