Benutzer: Gast  Login
Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Schukfeh, M.I.; Storm, K.; Hansen, A.; Thelander, C.; Hinze, P.; Beyer, A.; Weimann, T.; Samuelson, L.; Tornow, M.
Titel:
Formation of nanogaps in InAs nanowires by selectively etching embedded InP segments
Abstract:
We present a method to fabricate nanometer scale gaps within InAs nanowires by selectively etching InAs/InP heterostructure nanowires. We used vapor–liquid–solid grown InAs nanowires with embedded InP segments of 10–60 nm length and developed an etching recipe to selectively remove the InP segment. A photo-assisted wet etching process in a mixture of acetic acid and hydrobromic acid gave high selectivity, with accurate removal of InP segments down to 20 nm, leaving the InAs wire largely unattack...     »
Zeitschriftentitel:
Nanotechnology 25 465306 2014-10
Jahr:
2014
Jahr / Monat:
2014-10
Quartal:
4. Quartal
Monat:
Oct
Reviewed:
ja
Sprache:
en
WWW:
https://iopscience.iop.org/article/10.1088/0957-4484/25/46/465306
Verlag / Institution:
IOP Science
Status:
Postprint / reviewed
 BibTeX