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- Author(s):
- Ivashchenko, V. I.; VEPREK, S.
- Title:
- First-principles molecular dynamics study of the thermal stability of the BN, AlN, SiC and SiN interfacial layers in TiN-based heterostructures: Comparison with experiments
- Journal title:
- THIN SOLID FILMS
- Year:
- 2013
- Journal volume:
- 545
- Pages contribution:
- 391--400
- Fulltext / DOI:
- doi:10.1016/j.tsf.2013.08.047
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