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- Autor(en):
- Rasshofer, Ralph H.; Biebl, Erwin M.; Strohm, Karl M.; Luy, Johann-Friedrich
- Titel:
- Long-Term Stability of Passive Millimeterwave Circuits on High-Resistivity Silicon Substrates
- Abstract:
- We investigate the long-term performance of passive millimeterwave microstrip circuits on high resistivity silicon substrates. Three types of test structures were exposed to harsh environmental conditions such as thermal stress, humidity and organic vapors for 400 hours. Measured results at 38 GHz showed excellent long-term stability of the circuits. No significant difference between chips with and without SiOtextlesssubtextgreater2textless/subtextgreater passivation layer has been found though... »
- Stichworte:
- 38 GHz, 400 h, circuit stability, elemental semiconductors, environmental testing, harsh environmental conditions, high-resistivity silicon substrates, humidity, integrated circuit testing, long-term stability, losses, microstrip circuits, MIMIC, organic vapors, passive millimeter-wave circuits, photosensitivity, Si, silicon, test structures, thermal stress, thermal stresses
- Kongress- / Buchtitel:
- IEEE MTT-S International Microwave Symposium
- Band / Teilband / Volume:
- 2
- Verlagsort:
- Anaheim, CA, USA
- Jahr:
- 1999
- Monat:
- jun
- Seiten:
- 585--588
- Volltext / DOI:
- doi:10.1109/MWSYM.1999.779830
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