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Document type:
Masterarbeit
Author(s):
Javed, M.
Title:
Reducing Semiconductor FAB Emissions by Optimizing Changeovers in Photoresist Coating Processes Through Improved Scheduling
Abstract:
The manufacturing process of semiconductors is highly intricate, with each step requiring equipment, materials, and maintaining process parameters. Scheduling plays a role in semiconductor manufacturing. Currently, the focus of scheduling in this industry revolves around production-related performance indicators (KPIs) like cycle time, throughput, and yield. However, not much attention has been given to energy consumption and emission reduction during the scheduling process. It is worth noting t...     »
Advisor:
Greil, T.
Referee:
Grunow, M.
Year:
2023
University:
Technical University Munich
Faculty:
TUM School of Management
TUM Institution:
Chair of Production and Supply Chain Management
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