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Document type:
Zeitschriftenaufsatz 
Author(s):
Zähringer, S.; Schwesinger, N. 
Title:
What Happens Turning a 250µm Thin Piezo-stack Sideways? 
Abstract:
Usually when piezoelectric membrane actuators are mentioned, one classically thinks of a passive membrane with a piezoelectric actuator on top. In this paper omitting the passive membrane will be suggested. Therefore, the piezoelectric actuator will not be commonly designed as plate capacitor structure, such as that the piezoelectric material sitting between two plate electrodes. Rather will the actuation be caused by structured surface electrodes on only one side of the piezoelectric material,...    »
 
Journal title:
Microsystem Technologies 
Year:
2010 
Journal volume:
Volume 16 
Month:
May 
Journal issue:
Pages contribution:
871-877 
Reviewed:
ja 
Language:
en 
Publisher:
Springer-Verlag 
Print-ISSN:
0946-7076 
E-ISSN:
1432-1858 
Semester:
WS 09-10 
Format:
Text