User: Guest  Login
Document type:
Zeitschriftenaufsatz 
Author(s):
Harrer, S.; Strobel, S.; Scarpa, G.; Abstreiter, G.; Tornow, M.: Lugli, P. 
Title:
Room temperature nanoimprint lithography using molds fabricated by molecular beam epitaxy 
Abstract:
We have demonstrated single-step room temperature nanoimprint lithography (RTNIL) using polystyrene (PS, average molecular weights ranging from 13 to 97 kg/mol) as the imprint polymer layer on a silicon substrate for imprinting rectangular line patterns with varying aspect ratios, ranging from 11 to 500 nm wide. To accomplish this demonstration, we designed and built a tool that controllably pressed a mold into a stationary imprint sample applying imprint pressures between 280 and 700 MPa. The m...    »
 
Journal title:
Nanotechnology, IEEE Transactions on (Volume:7 , Issue: 3 ) 
Year:
2008 
Year / month:
2008-05 
Quarter:
2. Quartal 
Month:
May 
Language:
en 
Publisher:
IEEE Xplore Digital Library 
Format:
Text