User: Guest  Login
Document type:
Konferenzbeitrag 
Author(s):
Scarpa, G.; Harrer, S.; Abdellah, A.; Penso-Blanco, G.; Lugli, P.; Strobel, S.; Abstreiter, G.; Tornow, M. 
Title:
Pattern generation by using high-resolution nanoimprinting and nanotransfer printing techniques 
Abstract:
Nanofabrication is the core task performed and constantly further developed by todays and future semiconductor industry. Optimization of throughput and minimizing process cost and complexity thus increasing fabrication reliability constitute the main challenges within this development. Printing techniques play a crucial role in nanofabrication since they are offering the capability of large area patterning while simultaneously holding overall process time shorter than when using any other conven...    »
 
Book / Congress title:
Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on, 432-438 (2009) 
Congress (additional information):
Genoa, Italy, July 26 - 30, 2009 
Publisher:
IEEE Xplore Digital Library 
Year:
2009 
Quarter:
3. Quartal 
Year / month:
2009-07 
Month:
Jul 
Pages:
432 - 438 
Print-ISBN:
978-1-4244-4832-6 
Language:
en