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Dokumenttyp:
Konferenzbeitrag 
Autor(en):
Scarpa, G.; Harrer, S.; Abdellah, A.; Penso-Blanco, G.; Lugli, P.; Strobel, S.; Abstreiter, G.; Tornow, M. 
Titel:
Pattern generation by using high-resolution nanoimprinting and nanotransfer printing techniques 
Abstract:
Nanofabrication is the core task performed and constantly further developed by todays and future semiconductor industry. Optimization of throughput and minimizing process cost and complexity thus increasing fabrication reliability constitute the main challenges within this development. Printing techniques play a crucial role in nanofabrication since they are offering the capability of large area patterning while simultaneously holding overall process time shorter than when using any other conven...    »
 
Kongress- / Buchtitel:
Nanotechnology, 2009. IEEE-NANO 2009. 9th IEEE Conference on, 432-438 (2009) 
Kongress / Zusatzinformationen:
Genoa, Italy, July 26 - 30, 2009 
Verlag / Institution:
IEEE Xplore Digital Library 
Jahr:
2009 
Quartal:
3. Quartal 
Jahr / Monat:
2009-07 
Monat:
Jul 
Seiten:
432 - 438 
Print-ISBN:
978-1-4244-4832-6 
Sprache:
en