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- Document type:
- Konferenzbeitrag
- Contribution type:
- Textbeitrag / Aufsatz
- Author(s):
- Riedl, X.; Boltzmacher, C.; Wagner, R.; Bauer, K.; Schwesinger, N.
- Title:
- A capacitive pressure sensor with a structured PDMS dielectric layer
- Book / Congress title:
- E-MRS-spring meeting
- Year:
- 2010
- Quarter:
- 2. Quartal
- Month:
- Jun
- Reviewed:
- nein
- Language:
- en
- Semester:
- SS 10
- Format:
- Text
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