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Document type:
Konferenzbeitrag 
Contribution type:
Textbeitrag / Aufsatz 
Author(s):
Riedl, X.; Boltzmacher, C.; Wagner, R.; Bauer, K.; Schwesinger, N. 
Title:
A capacitive pressure sensor with a structured PDMS dielectric layer 
Book / Congress title:
E-MRS-spring meeting 
Year:
2010 
Quarter:
2. Quartal 
Month:
Jun 
Reviewed:
nein 
Language:
en 
Semester:
SS 10 
Format:
Text