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Document type:
Konferenzbeitrag 
Contribution type:
Textbeitrag / Aufsatz 
Author(s):
Zähringer, S.; Menacher, M.; Kirchner, P.; Schwesinger, N. 
Title:
Normally closed piezoelectric micro valve 
Pages contribution:
105-109 
Abstract:
Based on a previously developed piezoelectric membrane actuator a normally closed piezoelectric micro valve was designed. The presented paper briefly explains the principle of this novel actuator and continues with the possible design of a normally closed piezoelectric micro valve. The actuator operates with surface electrodes. The thus generated electric field causes an inhomogeneous mechanical stress distribution within the piezoelectric material. Because of this the piezoelectric material is...    »
 
Book / Congress title:
Design Test Integration and Packaging of MEMS/MOEMS (DTIP) 
Year:
2010 
Quarter:
2. Quartal 
Month:
May 
Covered by:
Scopus 
Print-ISBN:
978-1-4244-6636-8 
E-ISBN:
978-2-35500-011-9 
Reviewed:
ja 
Language:
en 
Semester:
SS 10 
Format:
Text