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- Title:
Characteriztion of Convex Corner Compensation for Bent V-Grooves in Anisotropic Silicon KOH Etching
- Document type:
- Report / Forschungsbericht
- Author(s):
- Yong, T. K.
- Contracting organization:
- Fachgebiet Mikrostrukturierte Mechatronische Systeme
- Year:
- 2014
- Year / month:
- 2014-12
- Format:
- Text
BibTeX