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- Author(s):
- VEPREK, S
- Title:
- SURFACE PROCESSES AND RATE-DETERMINING STEPS IN PLASMA-INDUCED CHEMICAL VAPOR-DEPOSITION - TITANIUM NITRIDE, BORON-CARBIDE AND SILICON
- Journal title:
- SURFACE & COATINGS TECHNOLOGY
- Year:
- 1990
- Journal volume:
- 43-4
- Journal issue:
- 1-3
- Pages contribution:
- 154-166
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