Login
- Author(s):
- VEPREK, S; SAROTT, FA; RUCKSCHLOSS, M
- Title:
- TEMPERATURE-DEPENDENCE OF THE CRYSTALLITE SIZE AND CRYSTALLINE FRACTION OF MICROCRYSTALLINE SILICON DEPOSITED FROM SILANE BY PLASMA CVD
- Journal title:
- JOURNAL OF NON-CRYSTALLINE SOLIDS
- Year:
- 1991
- Journal volume:
- 137
- Pages contribution:
- 733-736
BibTeX