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- Author(s):
- RUHL, G; REHMET, R; KNIZOVA, M; al., et
- Title:
- In situ XPS studies of the deposition of TiNxCy films from tetrakis(dimethylamido)titanium(IV) and bis[N,N'-bis(tert-butyl)ethylenediamido]titanium(IV)
- Journal title:
- CHEMISTRY OF MATERIALS
- Year:
- 1996
- Journal volume:
- 8
- Journal issue:
- 12
- Pages contribution:
- 2712-2720
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