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- Author(s):
- HOFMANN, J; VEPREK, S; HEINDL, J
- Title:
- Pseudomorphic growth of ultrathin cubic 3C-SiC films on Si(100) by temperature programmed organometallic chemical vapor deposition
- Journal title:
- JOURNAL OF APPLIED PHYSICS
- Year:
- 1999
- Journal volume:
- 85
- Journal issue:
- 5
- Pages contribution:
- 2652-2657
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